The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Mar. 16, 2006
Noboru Wada, Tokyo, JP;
Masaki Kuzumoto, Tokyo, JP;
Hajime Nakatani, Tokyo, JP;
Hiroyuki Igehara, Tokyo, JP;
Norimitsu Esaki, Tokyo, JP;
Shingo Mine, Tokyo, JP;
Taichiro Tamida, Tokyo, JP;
Noboru Wada, Tokyo, JP;
Masaki Kuzumoto, Tokyo, JP;
Hajime Nakatani, Tokyo, JP;
Hiroyuki Igehara, Tokyo, JP;
Norimitsu Esaki, Tokyo, JP;
Shingo Mine, Tokyo, JP;
Taichiro Tamida, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.