The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Feb. 11, 2009
Douglas Ray Sparks, Whitmore Lake, MI (US);
Richard Thayre Smith, Saline, MI (US);
Nader Najafi, Ann Arbor, MI (US);
Douglas Ray Sparks, Whitmore Lake, MI (US);
Richard Thayre Smith, Saline, MI (US);
Nader Najafi, Ann Arbor, MI (US);
Integrated Sensing Systems, Inc., Ypsilanti, MI (US);
Abstract
A microelectromechanical system (MEMS) device and method for operating the device to determine a property of a fluid. The device has a tube that extends from a base and is spaced apart from a substrate surface for vibrational movement in a plane normal to the surface. The tube defines a continuous internal passage having a fluid inlet and fluid outlet fluidically connected to the base. A cantilevered member attached to a distal portion of the tube opposite the base is configured for vibrational movement relative to the distal portion. A drive electrode operable to induce vibrational movements in the tube and cantilevered member is disposed on the substrate surface. Sensing electrodes are disposed on the substrate surface for sensing Coriolis-induced deflections of the tube when vibrated, generating outputs from which a property of a fluid flowing through the tube can be determined.