The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Mar. 13, 2007
Applicants:
Hiroto Sugahara, Aichi-ken, JP;
Motohiro Yasui, Nagoya, JP;
Inventors:
Hiroto Sugahara, Aichi-ken, JP;
Motohiro Yasui, Nagoya, JP;
Assignee:
Brother Kogyo Kabushiki Kaisha, Aichi-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A film-forming nozzle is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer is formed by a film-forming nozzle moving relative to a vibration plate is positioned outside deformable portions of the vibration plate and overlaps with restricted portions. This reduces stress concentration on a portion of the piezoelectric layer corresponding to the boundary portion of the deposition areas, and therefore, damage of the piezoelectric material layer is prevented.