The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Sep. 16, 2008
Young-ki Ahn, Icheon-si, KR;
Jae-jeong Jeong, Cheonan-si, KR;
Bo-ram-chan Sung, Asan-si, KR;
Kyo-woog Koo, Cheonan-si, KR;
Young-Ki Ahn, Icheon-si, KR;
Jae-Jeong Jeong, Cheonan-si, KR;
Bo-Ram-Chan Sung, Asan-si, KR;
Kyo-Woog Koo, Cheonan-si, KR;
Semes Co., Ltd., Cheonan-si, KR;
Abstract
In an apparatus for transferring a substrate, a partition wall is disposed in a vertical direction in a housing to divide an interior space of the housing into a first space and a second space. A pressure generating member divides the first space into an upper space and a lower space and moves in a vertical direction in the first space such that a positive pressure and a negative pressure are alternately generated in the upper space and the lower space. A substrate supporting member is movably disposed in the second space to support and to transfer the substrate. A plurality of gates is disposed on a side wall of the housing and the partition wall, and is opened and closed by the positive pressure and the negative pressure such that the particles are eliminated from the second space to an exterior space via the first space.