The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2011

Filed:

Jun. 20, 2005
Applicants:

Makoto Tanaka, Yokkaichi, JP;

Shigehiro Suzuki, Kuwana, JP;

Inventors:

Makoto Tanaka, Yokkaichi, JP;

Shigehiro Suzuki, Kuwana, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel () for feeding fluid, with a means () for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism () for controlling the mass flow rate by varying the valve opening by a valve drive signal.


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Tanaka, Makoto. (2011). Flow controller and its regulation method (U.S. Patent No. 7918238). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7918238

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