The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Dec. 21, 2007
Applicants:
Masanao Murata, Ise, JP;
Susumu Maetaki, Ise, JP;
Inventors:
Masanao Murata, Ise, JP;
Susumu Maetaki, Ise, JP;
Assignee:
Muratec Automation Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/00 (2006.01); G01F 1/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
A stockerincludes a storage FOUP, plural purge units, a measurement FOUPand a stacker crane. The storage FOUPstores a semiconductor wafer inside. The measurement FOUPincludes a flow meter inside. The purge unitincludes a purge shelfhaving plural purge tablesfor placing the storage FOUP, and a nitrogen gas is supplied into the storage FOUPplaced on the purge table. The stacker cranetransports the storage containeronto the purge table, and the measurement FOUPis transported between the plural purge tables