The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Dec. 17, 2008
Byron V. Bell, Paris, KY (US);
Robert W. Cornell, Lexington, KY (US);
Yimin Guan, Lexington, KY (US);
George K. Parish, Winchester, KY (US);
Byron V. Bell, Paris, KY (US);
Robert W. Cornell, Lexington, KY (US);
Yimin Guan, Lexington, KY (US);
George K. Parish, Winchester, KY (US);
Lexmark International, Inc., Lexington, KY (US);
Abstract
A process for making a fluid ejector head for a micro-fluid ejection device. In one embodiment, the process comprises depositing a thin film resistive layer on a substrate to provide a plurality of thin film heaters. The thin film resistive layer comprises a tantalum-aluminum-nitride material consisting essentially of AlN, TaN, and TaAl alloys, and containing from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.