The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Mar. 31, 2009
Applicant:
Jeannie Geneczko, Carlisle, MA (US);
Inventor:
Jeannie Geneczko, Carlisle, MA (US);
Assignee:
BAE Systems Information and Electronic Systems Integration Inc., Nashua, NH (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microbolometer pixel and a reduced-step process for manufacturing it comprising the step of ion implantation of vanadium oxide whereby VOis converted to a low resistivity mixed phase vanadium oxide (VO/VO/VO/V) in the leg, metallized support post, and detector contact areas. Masking maintains high temperature coefficient of resistance (TCR) VOin the sensing portion of the pixel bridge region. The implanted area resistivity and TCR can be controlled by ion implantation dose and energy.