The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Aug. 23, 2007
Mitsuji Yoshibayashi, Shizuoka-ken, JP;
Mitsuji Yoshibayashi, Shizuoka-ken, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
The present invention provides a production method for a color filter including forming a first colored layer on a support, forming a photoresist layer on the first colored layer, forming an image on the first colored layer by removing the photoresist layer in the form of an image pattern, etching the first colored layer in the form of the image formed in the forming the image by use of a dry etching process that uses a mixed gas in which a fluorine-based gas and oxygen (O) are mixed at a mixing ratio (fluorine-based gas/O), by flow rate ratio, in the range of from 2/1 to 8/1, and removing the photoresist layer remaining after the etching.