The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Oct. 26, 2007
Applicants:
Christopher L. Schutte, Richardson, TX (US);
George T. Wallace, Plano, TX (US);
Inventors:
Christopher L. Schutte, Richardson, TX (US);
George T. Wallace, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C03C 25/68 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor wafer handler comprises a ring () attached to a hub () by a plurality of spokes (). Vacuum is applied to the surface of the semiconductor wafer through orifices () containing in the ring (). Water and/or nitrogen can be applied to the surface of the semiconductor wafer through orifices () contained in the spokes ().