The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Jul. 25, 2008
Chang-min Cho, Gyeonggi-do, KR;
Joo-young Kim, Seoul, KR;
Ji-young Kim, Gyeonggi-do, KR;
Ju-a Ryu, Seoul, KR;
Yo-han Ahn, Gyeonggi-do, KR;
Hyung-seok Choi, Gyeonggi-do, KR;
Dong-seok Ham, Gyeonggi-do, KR;
Chang-Min Cho, Gyeonggi-do, KR;
Joo-Young Kim, Seoul, KR;
Ji-Young Kim, Gyeonggi-do, KR;
Ju-A Ryu, Seoul, KR;
Yo-Han Ahn, Gyeonggi-do, KR;
Hyung-Seok Choi, Gyeonggi-do, KR;
Dong-Seok Ham, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An air filtering device and an air cleaning system of a semiconductor manufacturing apparatus to reduce cost and increase manufacturing productivity. The air filtering device may include a frame having an open aperture coupled to an air supply line. A buffer frame configured to be inserted into the frame may include a plurality of slot parts, each slot part having a plurality of air in/out apertures through which air may flow in or out from the buffer frame. A plurality of filters may be releasably fastened to the plurality of slot parts to filter pollution material contained in air flowing through the air in/out apertures. An air interrupter for interrupting air flowing through the air in/out apertures may be used when replacing the plurality of filters, thereby providing purified air to the semiconductor manufacturing apparatus during the replacement.