The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Jan. 20, 2004
Masashi Ueda, Kanagawa, JP;
Yoshimi Watabe, Kanagawa, JP;
Shusaku Yamasaki, Kanagawa, JP;
Kazuo Miyoshi, Tokyo, JP;
Hiroyuki Otsuka, Kanagawa, JP;
Masashi Ueda, Kanagawa, JP;
Yoshimi Watabe, Kanagawa, JP;
Shusaku Yamasaki, Kanagawa, JP;
Kazuo Miyoshi, Tokyo, JP;
Hiroyuki Otsuka, Kanagawa, JP;
Ishikawajima-Harima Heavy Industries Co., Ltd., Tokyo, JP;
Abstract
A cooling system for a vacuum processing apparatus is provided with an internal heat conduction path for transfer of heat entering the subject body through the vacuum processing apparatus, a heat radiation path for radiation of the heat to an outside of the vacuum processing apparatus and a heat conduction path for regulation of quantity of heat transfer between the internal heat conduction path and the heat radiation path. Preferably, a heat pipe is applied to the internal heat conduction path.