The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2011

Filed:

Oct. 12, 2005
Applicants:

Manabu Seo, Kanagawa, JP;

Yasufumi Yamada, Kanagawa, JP;

Yoshihiro Norikane, Kanagawa, JP;

Inventors:

Manabu Seo, Kanagawa, JP;

Yasufumi Yamada, Kanagawa, JP;

Yoshihiro Norikane, Kanagawa, JP;

Assignee:

Ricoh Company, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 1/20 (2006.01); H01L 27/00 (2006.01); G03H 1/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A laser processing apparatus includes a laser source (), a spatial phase modulator () configured to modulate a phase of a laser beam emitted from the laser source, a synthetic data generator () configured to generate synthetic data by combining hologram image data representing a pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, the synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams, and a focusing optical unit () configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce the pattern image on the processed surface.


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