The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
May. 30, 2008
Tab A. Stephens, Buda, TX (US);
Leo Mathew, Austin, TX (US);
Lakshmanna Vishnubholta, Austin, TX (US);
Bruce E. White, Binghamton, NY (US);
Tab A. Stephens, Buda, TX (US);
Leo Mathew, Austin, TX (US);
Lakshmanna Vishnubholta, Austin, TX (US);
Bruce E. White, Binghamton, NY (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A method for processing a substrate comprising at least a buried oxide (BOX) layer and a semiconductor material layer is provided. The method includes etching the semiconductor material layer to form a vertical semiconductor material structure overlying the BOX layer, leaving an exposed portion of the BOX layer. The method further includes exposing a top surface of the exposed portion of the BOX layer to an oxide etch resistant species to form a thin oxide etch resistant layer overlying the exposed portion of the BOX layer.