The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Jun. 29, 2007
Yong-tae Cho, Kyoungki-do, KR;
Jae-seon Yu, Kyoungki-do, KR;
Yong-Tae Cho, Kyoungki-do, KR;
Jae-Seon Yu, Kyoungki-do, KR;
Hynix Semiconductor Inc., , KR;
Abstract
A method for fabricating a semiconductor device includes etching a substrate to form a first trench pattern, forming spacers over sidewalls of the first trench pattern, etching a bottom portion of the first trench pattern using the spacers as a barrier to form a second trench pattern, performing an isotropic etching on the second trench pattern to round sidewalls of the second trench pattern and form a bulb pattern, and forming a gate over a recess pattern including the first trench pattern, the rounded second trench pattern and the bulb pattern.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile