The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Nov. 05, 2007
Stefan Zimmermann, Laufenburg, DE;
Steve A. Miller, Canton, MA (US);
Prabhat Kumar, Framingham, MA (US);
Mark Gaydos, Nashua, NH (US);
Stefan Zimmermann, Laufenburg, DE;
Steve A. Miller, Canton, MA (US);
Prabhat Kumar, Framingham, MA (US);
Mark Gaydos, Nashua, NH (US);
H.C. Starck GmbH, Goslar, DE;
H.C. Starck, Inc., Newton, MA (US);
Abstract
In various embodiments, large-area sputtering targets are formed by providing a plurality of sputtering targets each comprising a backing plate and a refractory metal layer disposed thereon, and spray depositing a refractory metal powder on an interface between the sputtering targets, the refractory metal powder consisting essentially of the same metal as each refractory metal layer, thereby joining the refractory metal layers of the sputtering targets.