The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Mar. 23, 2005
Hiroshi Sugimoto, Kyoto, JP;
Yoshio Sone, Kyoto, JP;
Tetsuro Ohbayashi, Tokyo, JP;
Osaka Vacuum, Ltd., Osaka, JP;
Abstract
A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage for a gas; a high-temperature flat plate group (high-temperature portion) having a plurality of flat plates as high-temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage; and, a temperature-operating device operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates are displaced from each other in the flow direction of the flow passage, and a heat insulating layer is interposed between the low-temperature flat plates and the high-temperature flat plates.