The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Nov. 10, 2006
Applicants:
Kimiyuki Yamasaki, Fukuoka, JP;
Seikou Abe, Fukuoka, JP;
Takahiro Fukagawa, Fukuoka, JP;
Inventors:
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 17/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
The clearance 'd' between a substrateand a maskcan be reduced at the time of the position recognition by horizontally offsetting two recognition devicesfor recognizing the substrateand the mask. Therefore, since the ascending stroke of the substratecan be shortened at the time of the position alignment to contact the rear face of the substratewith the rear face of the mask, the position misalignment of the substrate in the horizontal direction caused by the raising is suppressed. Accordingly, it is possible to suppress the reduction of the position alignment accuracy with the mask