The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Jan. 24, 2008
Seyed R. Zarabadi, Kokomo, IN (US);
John C. Christenson, Kokomo, IN (US);
Dan W. Chilcott, Greentown, IN (US);
Richard G. Forestal, Carmel, IN (US);
Jack D. Johnson, Russiaville, IN (US);
Seyed R. Zarabadi, Kokomo, IN (US);
John C. Christenson, Kokomo, IN (US);
Dan W. Chilcott, Greentown, IN (US);
Richard G. Forestal, Carmel, IN (US);
Jack D. Johnson, Russiaville, IN (US);
Delphi Technologies, Inc., Troy, MI (US);
Abstract
A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.