The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Oct. 28, 2005
Takashi Kasai, Nara, JP;
Fumihito Kato, Hatogaya, JP;
Hiroshi Imamoto, Konan, JP;
Fumihiko Sato, Tsuchiura, JP;
Masaki Munechika, Nara, JP;
Toshiyuki Takahashi, Nara, JP;
Takashi Kasai, Nara, JP;
Fumihito Kato, Hatogaya, JP;
Hiroshi Imamoto, Konan, JP;
Fumihiko Sato, Tsuchiura, JP;
Masaki Munechika, Nara, JP;
Toshiyuki Takahashi, Nara, JP;
OMRON Corporation, Kyoto, JP;
Abstract
A vibration electrode plateis formed on the upper face of a silicon substratewith an insulating coat filminterposed in between. An opposing electrode plateis placed on the vibration electrode platewith an insulating coat film interposed in between, and acoustic holesare opened through the opposing electrode plate. Etching holesand, each having a semi-elliptical shape, are opened through the vibration electrode plateand the opposing electrode plateso as to face each other longitudinally. A concave sectionhaving a truncated pyramid shape is formed in the upper face of the silicon substrate, by carrying out an etching process through the etching holesand. The vibration electrode plateis held in the silicon substrateby a holding portionplaced between the etching holes