The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Sep. 15, 2008
Masao Mizuta, Kyoto, JP;
Motoaki Hamada, Kyoto, JP;
Masao Mizuta, Kyoto, JP;
Motoaki Hamada, Kyoto, JP;
Horiba, Ltd., , JP;
Abstract
A substrate measuring stage used for a curve measuring system measuring a curve of the substrate and an ordinary measuring system measuring each of or one of a physical quantity and a chemical quantity of the substrate other than the curve, may include the mounting board movable between an ordinary measurement position for the ordinary measuring system and a retreat position away from and downward of the ordinary measurement position; the plurality of support pins insertable into through-holes provided in the mounting board and fixed to a curve measurement position for the curve measuring system; and a drive mechanism vertically moving the mounting board between the ordinary measurement position and the retreat position. The curve measurement position is set between the ordinary measurement position and the retreat position.