The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Oct. 11, 2007
Hiroyuki Sekiguchi, Utsunomiya, JP;
Hiroyuki Sekiguchi, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A positioning apparatus, which positions a stage, includes a measurement system that measures a position of the stage. The measurement system includes a plurality of measuring devices that are spaced apart from each other along a first direction and measure a position of the stage in a second direction. A switching unit switches between the measuring devices to measure the position of the stage when the stage moves in at least the first direction. A correction unit corrects, based on an acceleration of the stage, the value measured by the measurement system. When the switching unit switches between the plurality of measuring devices, the correction unit corrects, based on a value obtained by the correction, a value measured by a measuring device after the switching.