The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Nov. 21, 2008
Jeffrey Denatale, Thousand Oaks, CA (US);
Atul Joshi, Thousand Oaks, CA (US);
Per-olov Pettersson, Thousand Oaks, CA (US);
Jeffrey DeNatale, Thousand Oaks, CA (US);
Atul Joshi, Thousand Oaks, CA (US);
Per-Olov Pettersson, Thousand Oaks, CA (US);
Teledyne Scientific & Imaging, LLC, Thousand Oaks, CA (US);
Abstract
A semiconductor device and method for fabricating the same is provided. The semiconductor device includes a substrate, at least one capacitor, an active circuit and a power plane. The substrate has a first cavity formed through a first surface to a first depth and a second cavity formed through a second surface to a second depth. The first and second cavities forming a via hole through the substrate. The at least one capacitor includes a first conductive material layer deposited in the via hole, a first isolation material layer deposited over the first conductive material layer, and a second conductive material layer deposited over the first isolation material layer. The active circuit adjacent the first surface and electrically coupled to the at least one capacitor, and the power plane adjacent the second surface and electrically coupled to the at least one capacitor to provide power conditioning to the active circuit.