The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Jul. 17, 2008
Kengo Suzuki, Hitachinaka, JP;
Takeshi Harada, Tokyo, JP;
Yasuo Osone, Kasumigaura, JP;
Masahide Hayashi, Mito, JP;
Teruhisa Akashi, Moriya, JP;
Kengo Suzuki, Hitachinaka, JP;
Takeshi Harada, Tokyo, JP;
Yasuo Osone, Kasumigaura, JP;
Masahide Hayashi, Mito, JP;
Teruhisa Akashi, Moriya, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
There is provided a physical sensor which ensures long-term reliability and can be miniaturized and increased in density, and a method of producing the same. A physical sensor includes a supporting substrate, an element substrate that includes a sensor element and is joined to the supporting substrate through an insulating layer, a glass cap that covers an area of the sensor element and is joined to the element substrate, and a built-in electrode that is electrically connected to the sensor element. The built-in electrode is formed in a through hole passing through the element substrate, the insulating layer and the supporting substrate. A portion of the glass cap that covers an area of the built-in electrode is anodically bonded to the element substrate.