The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Apr. 30, 2008
Masaaki Sugimoto, Kanagawa, JP;
Masaaki Sugimoto, Kanagawa, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
Management of countermeasure of pollution particles deposited on an object to be processed is optimized based on a cause of the pollution. Data processing and management equipmentcomprises a functional approximation partto make a mathematical model of a relation between measured numbers of particles deposited on a substrate during processing in a surface structuring device or a film forming device and accumulated amount processed after cleaning up of the device by a functional equation based on a cause of the deposit of the particles. A judging partspecifies the cause of the deposit of particles by comparing the functional equation with the measured numbers of particles.