The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 08, 2011

Filed:

Jan. 12, 2007
Applicants:

Tetsuichi Satonaga, Kanagawa, JP;

Koki Uwatoko, Kanagawa, JP;

Koji Adachi, Kanagawa, JP;

Kaoru Yasukawa, Kanagawa, JP;

Inventors:

Tetsuichi Satonaga, Kanagawa, JP;

Koki Uwatoko, Kanagawa, JP;

Koji Adachi, Kanagawa, JP;

Kaoru Yasukawa, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/03 (2006.01);
U.S. Cl.
CPC ...
Abstract

A failure analysis system includes an obtaining portion that obtains read-in image information that is image information obtained by reading an output image, a memory that stores fundamental image reduction information that is information in which an information amount of fundamental image information is reduced, the fundamental image information serving as a fundamental of the output image, a calculating portion that calculates a characteristic value of a projecting waveform by use of differential information between read-in image reduction information and the fundamental image reduction information, the read-in image reduction information being information in which the information amount of the read-in image information obtained by the obtaining portion is reduced, the fundamental image reduction information being stored in the memory; and a determining portion that determines a defect type group that is a group of defect types of elements included in the output image by use of a clustering process.


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