The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Mar. 27, 2009
Fuzheng Zhou, Santa Clara, CA (US);
Jufen Hua, Legal Representative, Santa Clara, CA (US);
Haiwen Wang, Mountain View, CA (US);
Chung-po Huang, San Jose, CA (US);
Fuzheng Zhou, Santa Clara, CA (US);
Jufen Hua, legal representative, Santa Clara, CA (US);
Haiwen Wang, Mountain View, CA (US);
Chung-Po Huang, San Jose, CA (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
Lasers configured for intracavity harmonic generation of second and higher order harmonic laser beam energy include mode-matching optics, such as a curved mirror, for recycling an unused portion of an intermediate harmonic laser beam energy (e.g., second harmonic laser beam energy) to improve higher order harmonic laser beam energy generation efficiency (e.g., third or higher order harmonic laser beam energy generation efficiency) without sacrificing beam quality of the higher order harmonic laser beam energy. The curved mirror may be positioned out of a resonant laser cavity of the laser. A radius of curvature and a position of the curved mirror are selected so that a beam radius and a beam divergence of the recycled second harmonic laser beam energy are essentially the same as a beam radius and a beam divergence of incoming second harmonic laser beam energy everywhere along a beam path of the incoming second harmonic laser beam.