The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Jul. 24, 2008
Manish Kothari, Cupertino, CA (US);
Hung-ta Chang, Taipei, TW;
Jan Bos, Hsinchu, TW;
Surya Prakash Ganti, Los Altos, CA (US);
Manish Kothari, Cupertino, CA (US);
Hung-Ta Chang, Taipei, TW;
Jan Bos, Hsinchu, TW;
Surya Prakash Ganti, Los Altos, CA (US);
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Abstract
MEMS devices include materials which are used in LCD or OLED fabrication to facilitate fabrication on the same manufacturing systems. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and use of transparent conductors for partially transparent electrodes can be avoided to minimize the number of materials needed and minimize fabrication costs. Certain layers comprise alloys selected to achieve desired properties. Intermediate treatment of deposited layers during the manufacturing process can be used to provide layers having desired properties.