The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Mar. 04, 2009
Yoshihiro Mizuno, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.