The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Mar. 27, 2006
Akira Morohashi, Utsunomiya, JP;
Iwao Nakamura, Imizo, JP;
Ryota Sasajima, Toyama, JP;
Keishin Yamazaki, Takaoka, JP;
Sadao Nakashima, Toyama, JP;
Akira Morohashi, Utsunomiya, JP;
Iwao Nakamura, Imizo, JP;
Ryota Sasajima, Toyama, JP;
Keishin Yamazaki, Takaoka, JP;
Sadao Nakashima, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
A heat-treating apparatus capable of realizing a highly precise processing maintaining a high degree of safety, and a method of producing substrates are provided. The heat-treating apparatus comprises a reaction tube for treating substrates; a manifold for supporting the reaction tube; and a heater provided surrounding the reaction tube to heat the interior of reaction tube; wherein the reaction tube and the manifold are in contact with each other as their continuous flat surfaces come in contact with each other; a cover member is provided to cover the contact portion between the reaction tube and the manifold from the outer side; and the cover member is provided with at least either a gas feed port or an exhaust port communicated with a space formed among the cover member, the reaction tube and the manifold.