The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Nov. 30, 2007
Jeffrey Alan Hawthorne, Decatur, GA (US);
M. Brandon Steele, Decatur, GA (US);
Yeyuan Yang, Marietta, GA (US);
Mark Schulze, Austin, TX (US);
Jeffrey Alan Hawthorne, Decatur, GA (US);
M. Brandon Steele, Decatur, GA (US);
Yeyuan Yang, Marietta, GA (US);
Mark Schulze, Austin, TX (US);
QCEPT Technologies, Inc., Atlanta, GA (US);
Abstract
A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.