Switching element, antenna switch circuit and radio frequency module using the same

Abstract

A switching element is provided that realizes an stabilize a potential between the gates of the multi-gates without an increase in the insertion loss, and an antenna switch circuit and a radio frequency module each using the switch element. The switching element includes two ohmic electrodesformed on a semiconductor substrate, at least two gate electrodesdisposed between the two ohmic electrodes, and a conductive regiondisposed between the adjacent gate electrodes among the at least two gate electrodes, a field effective transistor being structured by the two ohmic electrodes, the at least two gate electrodes, and the conductive region. The conductive region has a wider portion that is wider in width than the conductive region interposed between the adjacent gate electrodes on one end thereof. The distance between the adjacent gate electrodes is narrower than the width of the wider portion. Resistorsare connected in series between the two ohmic electrodes through the wider portion.