The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Feb. 26, 2008
David Berg, Rochester, NY (US);
Jacques Gollier, Painted Post, NY (US);
Douglas S Goodman, Pittsford, NY (US);
Correy Robert Ustanik, Painted Post, NY (US);
David Berg, Rochester, NY (US);
Jacques Gollier, Painted Post, NY (US);
Douglas S Goodman, Pittsford, NY (US);
Correy Robert Ustanik, Painted Post, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.