The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Jan. 09, 2008
Applicants:
Thor Bakke, Dresden, DE;
Thilo Sandner, Dresden, DE;
Inventors:
Thor Bakke, Dresden, DE;
Thilo Sandner, Dresden, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/006 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.