The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Dec. 31, 2008
Lawrence Chung-lai Lei, Milpitas, CA (US);
Alfred Mak, Fremont, CA (US);
Rex Liu, Castro Valley, CA (US);
Kon Park, Livermore, CA (US);
Samuel S. Pak, San Ramon, CA (US);
Tzy-chung Terry Wu, Palo Alto, CA (US);
Simon Zhu, Sunnyvale, CA (US);
Ronald L. Rose, San Jose, CA (US);
Gene Shin, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Lawrence Chung-Lai Lei, Milpitas, CA (US);
Alfred Mak, Fremont, CA (US);
Rex Liu, Castro Valley, CA (US);
Kon Park, Livermore, CA (US);
Samuel S. Pak, San Ramon, CA (US);
Tzy-Chung Terry Wu, Palo Alto, CA (US);
Simon Zhu, Sunnyvale, CA (US);
Ronald L. Rose, San Jose, CA (US);
Gene Shin, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Archers Inc., Gerogetown, Grand Cayman, KY;
Abstract
In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.