The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Aug. 24, 2007
Tomohiro Iwasaki, Osaka, JP;
Keiji Onishi, Osaka, JP;
Hiroshi Nakatsuka, Osaka, JP;
Takehiko Yamakawa, Osaka, JP;
Tomohide Kamiyama, Osaka, JP;
Tomohiro Iwasaki, Osaka, JP;
Keiji Onishi, Osaka, JP;
Hiroshi Nakatsuka, Osaka, JP;
Takehiko Yamakawa, Osaka, JP;
Tomohide Kamiyama, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A film bulk acoustic wave resonator including a piezoelectric body, and a first electrodeand a second electrodethat are provided respectively on the main surfaces of the piezoelectric body, the piezoelectric body being applied an electric field through the first and the second electrodes so as to generate a resonant vibration. A first mass load material portionhaving an annular shape is provided outside the planar region of the first electrode on the main surface of the piezoelectric body, a mass load effect thereof being larger than that of the first electrode. The outer periphery of the first electrode and the inner periphery of the first mass load material portion are spaced apart from each other, whereby the first electrode and the first mass load material portion are electrically insulated from each other. The first mass load material portion has a laminated structure including a first auxiliary electrode layerand a load material layerformed on the auxiliary electrode layer. The first auxiliary electrode is formed with the same material to have the same thickness as the first electrode. Energy loss can be reduced, while the first mass load material portion can be formed easily with high precision.