The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Apr. 15, 2010
Osamu Tsuboi, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Fujitsu Limited, Kanagawa, JP;
Abstract
A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion () electrically connected to the first driving electrode, a second conductor portion () electrically connected to the second driving electrode, and a third conductor portion () which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion () via an insulating film () and bonded to the second conductor portion () via the insulating film ().