The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2011

Filed:

Nov. 14, 2003
Applicants:

Charles Otis, Corvallis, OR (US);

Mehrgan Khavari, Corvallis, OR (US);

Jeffrey R. Pollard, Corvallis, OR (US);

Mark C. Huth, Corvallis, OR (US);

Inventors:

Charles Otis, Corvallis, OR (US);

Mehrgan Khavari, Corvallis, OR (US);

Jeffrey R. Pollard, Corvallis, OR (US);

Mark C. Huth, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

The described embodiments relate to laser micromachining a substrate. One exemplary method includes forming a feature into a substrate, at least in part, by directing a laser beam at the substrate. During at least a portion of said forming, the method includes supplying liquid to at least a first region of the feature along a first liquid supply path and supplying liquid to at least a second different region of the feature along at least a second liquid supply path.


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