The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Feb. 10, 2006
Jamie W. Speldrich, Freeport, IL (US);
Scott E. Beck, Murphy, TX (US);
Richard W. Gehman, Freeport, IL (US);
Martin G. Murray, Freeport, IL (US);
Ulrich Bonne, Hopkins, MN (US);
Jamie W. Speldrich, Freeport, IL (US);
Scott E. Beck, Murphy, TX (US);
Richard W. Gehman, Freeport, IL (US);
Martin G. Murray, Freeport, IL (US);
Ulrich Bonne, Hopkins, MN (US);
Honeywell International, Inc., Morristown, NJ (US);
Abstract
A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow sensor, which can be for example a microsensor having a microbrick® structure, has a hydrophilic layer which is disposed on the substrate and covers the sensing element(s). The hydrophilic layer is preferably formed from a spin on glass material, such as for example a silicate or phosphosilicate. A silicon nitride layer can be disposed on the sensing element(s) and interpose the substrate and the hydrophilic layer. The silicon nitride layer can be oxidized, for example, by means of plasma oxidation or oxygen ion implantation so to form the hydrophilic layer thereon. A variety of other hydrophilic compounds can be utilized to form the hydrophilic layer such as, gold, palladium and diamond like carbon.