The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Oct. 25, 2006
Soichi Sato, Tsukubamarai, JP;
Takashi Abe, Tsukubamirai, JP;
Eiko Miyasato, Tsukubamirai, JP;
Migaku Takahashi, Sendai, JP;
Masakiyo Tsunoda, Sendai, JP;
Soichi Sato, Tsukubamarai, JP;
Takashi Abe, Tsukubamirai, JP;
Eiko Miyasato, Tsukubamirai, JP;
Migaku Takahashi, Sendai, JP;
Masakiyo Tsunoda, Sendai, JP;
SMC Corporation, Tokyo, JP;
Tohoku University, Sendai-shi, JP;
Abstract
A working rod with a tip end extending into a vacuum process chamber and moving in the axial direction, two static-pressure gas bearings supporting the rod in the non-contact manner, and an internal moving body of a magnet coupling type driving mechanism driving the rod are housed in a rod housing cylindrical portion leading to the vacuum process chamber, and an exhaust portion by suction is provided at a part of the rod housing cylindrical portion so that the pressure of the rod housing cylindrical portion is lowered than the pressure of the vacuum process chamber by the exhaust from the exhaust portion.