The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Aug. 07, 2008
Applicants:
Florian Schoen, Munich, DE;
Robert Gruenberger, Nandlstadt, DE;
Mohsin Nawaz, Unterhaching, DE;
Bernhard Winkler, Munich, DE;
Inventors:
Florian Schoen, Munich, DE;
Robert Gruenberger, Nandlstadt, DE;
Mohsin Nawaz, Unterhaching, DE;
Bernhard Winkler, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H01L 29/84 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element comprising a semiconducting material, and at least one trench formed in the resonator element and filled with a material comprising oxide. Further embodiments comprise additional devices, systems and methods.