The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2011

Filed:

Mar. 25, 2008
Applicants:

Li-ya Yeh, Hsin-Chu, TW;

Chih-wei Chu, Hsin-Chu, TW;

Shu-chih Wang, Hsin-Chu, TW;

Wen-chang Hsieh, Hsin-Chu, TW;

Inventors:

Li-Ya Yeh, Hsin-Chu, TW;

Chih-Wei Chu, Hsin-Chu, TW;

Shu-Chih Wang, Hsin-Chu, TW;

Wen-Chang Hsieh, Hsin-Chu, TW;

Assignee:

Au Optronics Corporation, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 11/01 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate splitting apparatus and a method for splitting a substrate using the substrate splitting apparatus are provided. The substrate splitting apparatus includes a servo motor, a transmission device, a substrate breaking bar, and a stage. One end of the transmission is directly or indirectly coupled to the servo motor while the other end is coupled with the breaking bar. The stage has a load-lock surface and the load-lock surface faces the breaking bar. The servo motor drives the transmission device to move the breaking bar toward the load-lock surface. A substrate with a pre-crack on the bottom is disposed on the load-lock surface. The servo motor drives the substrate breaking bar to move towards or away from the pre-crack. The method of splitting includes the following steps: forming a pre-crack on the substrate; controlling the servo motor to drive the breaking bar to move towards the substrate; and controlling the breaking bar to press the substrate at the pre-crack.


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