The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2011

Filed:

Sep. 30, 2009
Applicants:

David Martin, Fort Collins, CO (US);

Donald Lee, Fort Collins, CO (US);

John Choy, Westminster, CO (US);

Joel Philliber, Fort Collins, CO (US);

Osvaldo Buccafusca, Fort Collins, CO (US);

Inventors:

David Martin, Fort Collins, CO (US);

Donald Lee, Fort Collins, CO (US);

John Choy, Westminster, CO (US);

Joel Philliber, Fort Collins, CO (US);

Osvaldo Buccafusca, Fort Collins, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.


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