The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Sep. 16, 2009
Hiroyuki Seki, Kanagawa, JP;
Katsuyuki Nukui, Kanagawa, JP;
Tadashi Inaba, Kanagawa, JP;
Hideo Fushimi, Kanagawa, JP;
Hiroyuki Seki, Kanagawa, JP;
Katsuyuki Nukui, Kanagawa, JP;
Tadashi Inaba, Kanagawa, JP;
Hideo Fushimi, Kanagawa, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
The invention provides a cleaning liquid for semiconductor devices which is capable of removing deposits on a surface of an object to be cleaned including a photoresist, an antireflective film, an etching residue and an ashing residue at a low temperature in a short period of time with reduced environmental burdens and without causing corrosion of an interlayer dielectric film, a metal, a metal nitride, and an alloy in the object to be cleaned. The cleaning liquid for semiconductor devices according to the invention contains a reducing agent and a surfactant and has a pH of 10 to 14.