The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Apr. 17, 2008
Applicants:
Martin Knaipp, Unterpremstätten, AT;
Bernhard Löffler, Gleisdorf, AT;
Inventors:
Martin Knaipp, Unterpremstätten, AT;
Bernhard Löffler, Gleisdorf, AT;
Assignee:
austriamicrosystems AG, Unterpremstatten, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a semiconductor body with a trench comprises the steps of etching the trench () in the semiconductor body () and forming a silicon oxide layer () on at least one side wall () of the trench () and on the bottom () of the trench () by means of thermal oxidation. Furthermore, the silicon oxide layer () on the bottom () of the trench () is removed and the trench () is filled with polysilicon that forms a polysilicon body ().