The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Aug. 28, 2007
Applicant:
Mitsuo Natume, Aichi, JP;
Inventor:
Mitsuo Natume, Aichi, JP;
Assignee:
Shinko Electric Co., Ltd., Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65G 49/07 (2006.01); B65G 1/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A mount base is adapted to be fixed to a partition wall which is disposed between a stockyard for temporarily storing a wafer carrier which houses a wafer and a wafer processing device for processing the wafer. A wafer transfer window is provided on the mount base. A carrier stage has a table horizontally extended from a lower edge of the wafer transfer window and a carrier plate disposed on the table so as to support the wafer carrier and movable so as to transfer the wafer carrier to the processing device. A buffer stage has a buffer plate horizontally disposed below the table so as to temporarily store the wafer carrier.