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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7886687 B1

PDFFull Text
Expired
Date of Patent:
Feb. 15, 2011

Filed:

Dec. 20, 2005

Plasma processing apparatus

Applicants:

Young Jong Lee, Sungnam-shi, KR;

Jun Young Choi, Seoul, KR;

Saeng Hyun JO, Daejeon, KR;

Young-joo Hwang, Seoul, KR;

Jong-cheon Kim, Pyeongtaek, KR;

Inventors:

Young Jong Lee, Sungnam-shi, KR;

Jun Young Choi, Seoul, KR;

Saeng Hyun Jo, Daejeon, KR;

Young-Joo Hwang, Seoul, KR;

Jong-Cheon Kim, Pyeongtaek, KR;

Assignee:

Advanced Display Process Engineering Co. Ltd., Sungnam-shi, KR;

Attorney:

KED & Assoicates, LLP

Primary Examiner:

Rudy Zervigon

Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/503 (2006.01); C23C 16/505 (2006.01); C23C 16/509 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.

Find Patent Forward Citations

Lee, Young. (2011). Plasma processing apparatus (U.S. Patent No. 7886687). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7886687

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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