The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Jul. 27, 2007
Masayuki Matsunaga, Kamiina-gun, JP;
Kenji Sato, Matsumoto, JP;
Masayuki Matsunaga, Kamiina-gun, JP;
Kenji Sato, Matsumoto, JP;
Epson Toyocom Corporation, Tokyo, JP;
Abstract
An inertial sensor, comprises a detection element detecting an amount of a physical quantity in a detection axis direction, a plurality of support members having flexibility and supporting nearly a center of the detection element, and a package substrate housing the detection element and the plurality of support members. In a case when an X-axis is defined as an extending direction of the plurality of support members, a Y-axis is perpendicular to the X-axis in a plane including the detection element, and a Z-axis is perpendicular to the X-axis and the Y-axis, one of load components in a direction of the Y-axis of the detection member applied to the plurality of support members is nearly equal to other among the plurality of support members, and one of load components in a direction of the Z-axis is nearly equal to the other among the plurality of support members.