The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Aug. 29, 2005
Keiji Nagai, Suita, JP;
Qincui Gu, New York, NY (US);
Takayoshi Norimatsu, Minoh, JP;
Shinsuke Fujioka, Amagasaki, JP;
Hiroaki Nishimura, Toyonaka, JP;
Katsunobu Nishihara, Toyono-gun, JP;
Noriaki Miyanaga, Minoh, JP;
Yasukazu Izawa, Ibaraki, JP;
Keiji Nagai, Suita, JP;
Qincui Gu, New York, NY (US);
Takayoshi Norimatsu, Minoh, JP;
Shinsuke Fujioka, Amagasaki, JP;
Hiroaki Nishimura, Toyonaka, JP;
Katsunobu Nishihara, Toyono-gun, JP;
Noriaki Miyanaga, Minoh, JP;
Yasukazu Izawa, Ibaraki, JP;
Osaka University, Osaka, JP;
Abstract
The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.