The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Jul. 29, 2008
Seong Mok Cho, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Woo Seok Yang, Daejeon, KR;
Sang Hoon Cheon, Daejeon, KR;
Byoung Gon Yu, Daejeon, KR;
Chang Auck Choi, Daejeon, KR;
Seong Mok Cho, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Woo Seok Yang, Daejeon, KR;
Sang Hoon Cheon, Daejeon, KR;
Byoung Gon Yu, Daejeon, KR;
Chang Auck Choi, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
Provided are a microbolometer having a cantilever structure and a method of manufacturing the same, and more particularly, a microbolometer having a three-dimensional cantilever structure, which is improved from a conventional two-dimensional cantilever structure, and a method of manufacturing the same. The method includes providing a substrate including a read-out integrated circuit and a reflective layer for forming an absorption structure, forming a sacrificial layer on the substrate, forming a cantilever structure having an uneven cross-section in the sacrificial layer, forming a sensor part isolated from the substrate by the cantilever structure, and removing the sacrificial layer.